High-Purity Nitrous Oxide Showa Denko Completes High-Purity Nitrous Oxide Base in South Korea

Editor: Dr. Jörg Kempf

Showa Denko, a leading Japanese chemical engineering firm, has increased its capacity for supplying high-purity nitrous oxide (N2O), a specialty gas for semiconductor production, by cooperating with Dooam Industrial (Dooam), of South Korea.

Related Vendors

New high-purity N2O production facility in South Korea
New high-purity N2O production facility in South Korea
(Picture: Showa Denko)

Tokyo/Japan – Dooam is headquartered in Anseong, Gyeonggi Province, and led by President Park Yup. Having jointly constructed a purification facility within the premises of Dooam’s plant near Seoul, the two companies will start full-scale operation of the new facility in March.

High-purity N2O is used for deposition of an insulating oxide film in the process of chemical vapor deposition (CVD) for producing semiconductors. For this application, demand for high-purity N2O in Asia is expected to grow at an annual rate of 10% or more. In recent years, demand is also growing for use as a source of oxygen for oxide film in the process of producing displays. SDK has therefore strengthened its high-purity N2O supply system to meet the growing demand.

With the addition of the newly completed 600t/y facility in South Korea to the existing 1,200t/y plant at Kawasaki, Japan, the Showa Denko Group’s high-purity N2O supply capacity has increased to 1,800t/y in total.

Under its medium-term consolidated business plan “PEGASUS Phase II”, SDK classifies its business in semiconductor-processing specialty gases, including high-purity ammonia, in the category of “Growth” business. SDK will aim to further expand the business on the world market, centering on Asia.

Subscribe to the newsletter now

Don't Miss out on Our Best Content

By clicking on „Subscribe to Newsletter“ I agree to the processing and use of my data according to the consent form (please expand for details) and accept the Terms of Use. For more information, please see our Privacy Policy.

Unfold for details of your consent

(ID:43192610)