New Customized Residual Gas Analysis System for Cleanliness Verification

Turn-Key Solutions New Customized Residual Gas Analysis System for Cleanliness Verification

2024-01-10 Source: Press release Pfeiffer Vacuum 1 min Reading Time

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Pfeiffer Vacuum offers a customized residual gas analysis system which incorporates energy-efficient components and advanced technologies. The system helps to optimize cleanliness verification processes.

Pfeiffer Vacuum offers a new customized RGA system for sophisticated cleanliness verification. (Source: Pfeiffer Vacuum) — Pfeiffer Vacuum offers a new customized RGA system for sophisticated cleanliness verification.
(Source: Pfeiffer Vacuum)

Pfeiffer Vacuum now offers customized turn-key solutions in the form of residual gas analysis systems. Fast-emerging markets with advancing technical requirements place an increasing value on superior cleanliness, as molecular contamination negatively affects the functionality of manufactured products. Therefore, more and more customers are defining higher requirements for cleanliness. For instance, in the EUV lithography market they are driven by the Generic Standards GSA 07 1221 & GSA 07 2221. Essential to securing the quality of parts is to properly determine the outgassing rates under a high vacuum environment by utilizing Pfeiffer Vacuum’s new Omnigrade system, shares the company.

Omnigrade is a sophisticated residual gas analysis (RGA) system. Its design is selected to meet the specific testing demands. A team of Pfeiffer Vacuum experts is dedicated to delivering the best solution to meet customer requirements, taking into account total cost of ownership and lead times. Omnigrade configurations include two or three chambers consisting of the spectrometer chamber in which the mass spectrometer is positioned, and a measurement chamber where the samples are placed during measurement. Options include a load lock chamber to minimize system background and an automated sample transport system, adds the firm.

The Omnigrade system was designed for low footprint demands and easy integration with latest interfaces. Cleanroom compatibility is possible and the mass spectrometer according to the requirements (Prismapro or Hiquad) can be selected. Thermal heating, either of the pure system or together with the sample (bake-out), will contribute to further optimizing the measuring capability and improving sample cleanliness, explains the company.

The firm mentions that Omnigrade incorporates energy-efficient components and advanced technologies that help to optimize cleanliness verification processes, resulting in less waste and more efficient use of resources in the customer’s production environment.

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