The sophisticated rotor design of Pfeiffer Vacuum’s Hi Pace 2800 IT turbopump results in an optimised pumping speed for light gases. (Pfeiffer Vacuum)
Turbopumps

New Turbopump for Ion Implantation Applications

With the Hi Pace 2800 IT, Pfeiffer Vacuum presents a turbopump especially dedicated for ion implantation applications. The sophisticated rotor design of the turbopump results in an optimised pumping speed for light gases. This ensures very good process adaption for ion implantation processes, were hydrogen is the most accumulating gas.

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