New Turbopump for Ion Implantation Applications

Turbopumps New Turbopump for Ion Implantation Applications

23.11.2020Editor: Ahlam Rais

With the Hi Pace 2800 IT, Pfeiffer Vacuum presents a turbopump especially dedicated for ion implantation applications. The sophisticated rotor design of the turbopump results in an optimised pumping speed for light gases. This ensures very good process adaption for ion implantation processes, were hydrogen is the most accumulating gas.

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Pfeiffer Vacuum GmbH

Italvacuum, Srl

Frewitt fabrique de machines SA

The sophisticated rotor design of Pfeiffer Vacuum’s Hi Pace 2800 IT turbopump results in an optimised pumping speed for light gases.
(Source: Pfeiffer Vacuum)

With 2,600 l/s pumping speed for hydrogen the new solution is the best turbopump in its class, states the company. The intelligent temperature management system prevents process condensation and deposition inside the pumping system. It allows setting the temperature individually to ideally support the process.

According to the firm, the special coating of the rotor ensures robustness against all ion implantation process materials. Being based on a so-called hybrid bearing, a combination of ceramic ball bearings on the fore-vacuum side and permanently magnetic radial bearings on the high vacuum side, these new turbopumps have a particularly robust bearing design. Together with the efficient coating, this forms the basis for the long-life cycle and maximum up-time of the pumps, mentions the company.

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