This 8-page brochure provides process and defect engineers, as well as production managers, with a quick reference to Thermo’s capability offerings in the fields of plasma mass spectroscopy, FT-IR metrology, Raman microspectroscopy and numerous X-ray spectroscopies including angle-resolved XPS, microbeam XRF and EDS for electron microscopy and defect review. In addition the new brochure demonstrates Thermo’s expertise in these manufacturing environments with specifically engineered instrumentation in both the support lab and on the fab floor with near-line and at-line measurement and metrology tools that meet the rigorous demands of production monitoring. It also provides a review of the capabilities, characteristics, benefits and applications of this instrument family, and provides background regarding each instrument’s underlying technique.